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Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator Conference paper
Proceedings of the IEEE Conference on Nanotechnology, Macao, 22-26 July 2019
Authors:  Hanlun Zhang;  Qingsong Xu
Favorite |  | TC[WOS]:0 TC[Scopus]:0 | Submit date:2021/03/09
Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors Conference paper
Proceedings of the IEEE Conference on Nanotechnology, Beijing, PEOPLES R CHINA, AUG 05-08, 2013
Authors:  Jia Y.;  Xu Q.
Favorite |  | TC[WOS]:7 TC[Scopus]:8 | Submit date:2018/12/23