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Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning Journal article
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2018,Volume: 16,Issue: 2,Page: 908 - 918
Authors:  Zeyi Wu;  Qingsong Xu
Favorite |  | TC[WOS]:13 TC[Scopus]:13 | Submit date:2019/04/18
Compliant Mechanism  Flexure Stage  Mechanism Design  Micro/nanopositioning  Piezoelectric Actuator (Pea)