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Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer Journal article
SMALL, 2017,Volume: 13,Issue: 44
Authors:  Binghao Liang;  Wenjun Chen;  Zhongfu He;  Rongliang Yang;  Zhiqiang Lin;  Huiwei Du;  Yuanyuan Shang;  Anyuan Cao;  Zikang Tang;  Xuchun Gui
Favorite |  | TC[WOS]:37 TC[Scopus]:36 | Submit date:2018/10/30
Carbon Nanotubes  Contact Resistance  Photoresist  Piezoresistive Pressure Sensor