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Fabrication of embossed capacitive micromachined ultrasonic transducers using sacrificial release process Journal article
IEICE Electronics Express, 2019,Volume: 16,Issue: 2
Authors:  Yu,Yuanyu;  Wang,Jiujiang;  Pun,Sio Hang;  Cheng,Ching Hsiang;  Lei,Kin Fong;  Vai,Mang I.;  Zhang,Shuang;  Mak,Peng Un
Favorite |  | TC[WOS]:1 TC[Scopus]:2 | Submit date:2021/03/11
Embossed capacitive micromachined ultrasonic transducer  Nickel electroplating  Sacrificial release process