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Effects of B content on microstructure and mechanical properties of nanocomposite Ti-Bx-Ny thin films Conference paper
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Authors:  Lu Y.H.;  Sit P.;  Hung T.F.;  Chen H.;  Zhou Z.F.;  Li K.Y.;  Shen Y.G.
Favorite |  | TC[WOS]:18 TC[Scopus]:21 | Submit date:2019/04/08