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2013 [2]
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Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors
Conference paper
Proceedings of the IEEE Conference on Nanotechnology, Beijing, PEOPLES R CHINA, AUG 05-08, 2013
Authors:
Jia Y.
;
Xu Q.
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TC[WOS]:
6
TC[Scopus]:
7
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Submit date:2018/12/23
Introduction: Smart Materials as Essential Base for Actuators in Micro/Nanopositioning
Book chapter
出自: Smart Materials-Based Actuators at the Micro/Nano-Scale:Springer Science+Business Media New York 2013, 2013
Authors:
Micky Rakotondrabe
;
Mohammad Al Janaideh
;
Alex Bienaimé
;
Qingsong Xu
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TC[WOS]:
0
TC[Scopus]:
1
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Submit date:2019/04/18
Piezoelectric Material
Smart Material
Hysteresis Effect
Hysteresis Model
Piezoelectric Actuator