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Design and testing of a new high-order integral terminal sliding mode controller
Conference paper
Chinese Control Conference, CCC
Authors:
Nan,Zhijie
;
Xu,Qingsong
;
Li,Shihua
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TC[Scopus]:
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Submit date:2021/03/09
Nanopositioning
Precision Motion Control
Sliding Mode Control
Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning
Journal article
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2019,Volume: 16,Issue: 2,Page: 908 - 918
Authors:
Zeyi Wu
;
Qingsong Xu
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TC[Scopus]:
13
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Submit date:2019/04/18
Compliant Mechanism
Flexure Stage
Mechanism Design
Micro/nanopositioning
Piezoelectric Actuator (Pea)