Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors
Jia Y.; Xu Q.
Conference Name13th IEEE Conference on Nanotechnology (IEEE-NANO)
Source PublicationProceedings of the IEEE Conference on Nanotechnology
Conference DateAUG 05-08, 2013
Conference PlaceBeijing, PEOPLES R CHINA

This paper presents the design of a new monolithic two-axis electrostatically actuated MEMS microgripper with integrated capacitive position and force sensors working at the micro-scale level. Each of the two jaws of the microgripper possesses two degree-of-freedom (DOF) and is capable of positioning in both x- and y-axes. Moreover, different from existing works where one gripper arm is actuated and other one is sensed, both arms of the proposed microgripper are actuated and sensed independently. A sensing scheme is then constructed to provide the position and force signals in the noncontact phase and contact phase, respectively. By applying a 120-V driving voltage, the jaw can provide 70 μm X direction and 18 μm Y direction displacements with the force of 190 μN. By this design, the real-time position and grasping force information can be obtained in the dual sensing mode. The performance of the designed microgripper is verified by both analytical modeling and finite-element analysis. © 2013 IEEE.

URLView the original
Indexed BySCIE
WOS Research AreaEngineering ; Science & Technology - Other Topics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology
WOS IDWOS:000346488300180
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Cited Times [WOS]:7   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
AffiliationUniversidade de Macau
First Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Jia Y.,Xu Q.. Design of a monolithic dual-axis electrostatic actuation MEMS microgripper with capacitive position/force sensors[C],2013:817-820.
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