UM  > Faculty of Science and Technology  > DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Design of a new compliant XY micro-positioning stage based on Roberts mechanism
Wan S.; Xu Q.
2014-03-09
Conference Name2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
Source Publication2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2014 - Conference Proceedings
Pages139-144
Conference DateOCT 27-31, 2014
Conference PlaceTaipei, TAIWAN
Abstract

Compliant micro-positioning mechanisms play an important role in precise positioning and displacement technology. In this paper, a new kind of compliant mechanism based on Roberts mechanisms is proposed for the mechanism design of a novel parallel-kinematic XY micro-positioning stage. Pseudo-rigid-body model (PRBM) is developed to establish the quantitative models, which show that the XY stage has a work range larger than 14 mm in each axis with a relative compact dimension. Moreover, the stage performances are verified by conducting finite-element analysis (FEA) simulation. Results not only validate the analytical models, but also demonstrate the nice decoupling performance of the designed XY stage. The FEA simulation results show that the parasitic motion in the non-working direction was less than 0.1% of the motion stroke. It indicates that the proposed design meets the requirements of a large stroke, high precision linear guiding mechanism. A prototype XY stage is fabricated for further investigation.

KeywordCompliant Mechanism Micro-positioning Pseudo Rigid Body Model (Prbm) Roberts Mechanisms Xy Stage
DOI10.1109/3M-NANO.2014.7057337
URLView the original
Indexed BySCI
WOS Research AreaScience & Technology - Other Topics
WOS SubjectNanoscience & Nanotechnology
WOS IDWOS:000380389000045
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Citation statistics
Cited Times [WOS]:3   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Wan S.,Xu Q.. Design of a new compliant XY micro-positioning stage based on Roberts mechanism[C],2014:139-144.
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