A dual-axis electrostatically driven MEMS microgripper
Jia Y.2; Jia M.1; Xu Q.2
Source PublicationInternational Journal of Advanced Robotic Systems
ISSN17298814 17298806

This paper presents the design of a new monolithic twoaxis electrostatically actuated MEMS microgripper with integrated capacitive position and force sensors working at the micro-scale level. Each of the two jaws of the microgripper possesses two degrees-of-freedom (DOF) and is capable of positioning in both x-and y-axes. Unlike existing works, where one gripper arm is actuated and other one is sensed, both arms of the proposed microgripper are actuated and sensed independently. A sensing scheme is constructed to provide the position and force signals in the noncontact and contact phases, respectively. By applying a 120V driving voltage, the jaw can provide 70 μm x-axis and 18 μm y-axis displacements with the force of 190 μN. By this design, the real-time position and grasping force information can be obtained in the dual sensing mode. Both analytical calculation and finite-element analysis (FEA) were performed to verify the performance of the proposed design. A scaled-up prototype is designed, fabricated and tested through the experiment to verify the structure design of the microgripper.

KeywordCapacitive Sensor Electrostatic Actuator Mems Microgripper
URLView the original
Indexed BySCIE
WOS Research AreaRobotics
WOS SubjectRobotics
WOS IDWOS:000345850100001
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Cited Times [WOS]:6   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
Affiliation1.Southeast University
2.Universidade de Macau
First Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Jia Y.,Jia M.,Xu Q.. A dual-axis electrostatically driven MEMS microgripper[J]. International Journal of Advanced Robotic Systems,2014,11.
APA Jia Y.,Jia M.,&Xu Q..(2014).A dual-axis electrostatically driven MEMS microgripper.International Journal of Advanced Robotic Systems,11.
MLA Jia Y.,et al."A dual-axis electrostatically driven MEMS microgripper".International Journal of Advanced Robotic Systems 11(2014).
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