UM  > Faculty of Science and Technology  > DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
A dual-axis electrostatically driven MEMS microgripper
Jia Y.2; Jia M.1; Xu Q.2
2014-11-24
Source PublicationInternational Journal of Advanced Robotic Systems
ISSN17298814 17298806
Volume11
Abstract

This paper presents the design of a new monolithic twoaxis electrostatically actuated MEMS microgripper with integrated capacitive position and force sensors working at the micro-scale level. Each of the two jaws of the microgripper possesses two degrees-of-freedom (DOF) and is capable of positioning in both x-and y-axes. Unlike existing works, where one gripper arm is actuated and other one is sensed, both arms of the proposed microgripper are actuated and sensed independently. A sensing scheme is constructed to provide the position and force signals in the noncontact and contact phases, respectively. By applying a 120V driving voltage, the jaw can provide 70 μm x-axis and 18 μm y-axis displacements with the force of 190 μN. By this design, the real-time position and grasping force information can be obtained in the dual sensing mode. Both analytical calculation and finite-element analysis (FEA) were performed to verify the performance of the proposed design. A scaled-up prototype is designed, fabricated and tested through the experiment to verify the structure design of the microgripper.

KeywordCapacitive Sensor Electrostatic Actuator Mems Microgripper
DOI10.5772/59677
URLView the original
Indexed BySCIE
WOS Research AreaRobotics
WOS SubjectRobotics
WOS IDWOS:000345850100001
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Cited Times [WOS]:6   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Affiliation1.Southeast University
2.Universidade de Macau
First Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Jia Y.,Jia M.,Xu Q.. A dual-axis electrostatically driven MEMS microgripper[J]. International Journal of Advanced Robotic Systems,2014,11.
APA Jia Y.,Jia M.,&Xu Q..(2014).A dual-axis electrostatically driven MEMS microgripper.International Journal of Advanced Robotic Systems,11.
MLA Jia Y.,et al."A dual-axis electrostatically driven MEMS microgripper".International Journal of Advanced Robotic Systems 11(2014).
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