Design of a new 5-DOF flexure-based nanopositioning stage | |
Zhang X.; Xu Q.![]() | |
2015 | |
Conference Name | IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
Source Publication | 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 |
Pages | 276-280 |
Conference Date | APR 07-11, 2015 |
Conference Place | Xian, PEOPLES R CHINA |
Abstract | In this paper, the design of a new compliant five-axis parallel nanopositioning stage driven by PZT actuators is presented, which is based on flexure mechanism. The flexure stage contains two kinds of displacement amplifiers based on simple lever principle and bridge principle, respectively. The lever structure is designed to meet the requirement of the change of direction of the output displacement. The double-bridge amplifier can achieve the large displacement by overcoming the stroke limitation of the actuator. Each pair of actuators realizes the translational displacement in one axis and the rotation in one plane. The flexure stage with three pairs of actuators can obtain 5-DOF motion as the rotation in XY-plane is redundant. FEA simulation is conducted to verify the dimension of the designed stage. Results demonstrate the performance of the designed multi-axis nanopositioning stage. |
Keyword | Compliant Mechanism Flexure Mechanism Nanopositioning Piezoelectric Actuation |
DOI | 10.1109/NEMS.2015.7147426 |
URL | View the original |
Indexed By | SCI |
WOS Research Area | Science & Technology - Other Topics ; Instruments & Instrumentation |
WOS Subject | Nanoscience & Nanotechnology ; Instruments & Instrumentation |
WOS ID | WOS:000380505700068 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Affiliation | Universidade de Macau |
Recommended Citation GB/T 7714 | Zhang X.,Xu Q.. Design of a new 5-DOF flexure-based nanopositioning stage[C],2015:276-280. |
Files in This Item: | There are no files associated with this item. |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment