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Design and analysis of an in-plane flexure XYZ micro/nano-positioning stage
Xiaozhi Zhang; Qingsong Xu
2016-10-27
Conference Name2016 International Conference on Advanced Robotics and Mechatronics (ICARM)
Source PublicationICARM 2016 - 2016 International Conference on Advanced Robotics and Mechatronics
Pages359-363
Conference Date18-20 Aug. 2016
Conference PlaceMacau, China
Abstract

This paper reports on a conceptual design for a modular XYZ micro/nano-positioning stage by employing bridge amplified flexure mechanism and piezoelectric actuators. The mechanism design and analysis of a new terse parallel flexure stage with three translational degrees-of-freedom (DOF) is presented. The FEA simulation of dynamics analysis and fatigue analysis are conducted to reveal the capacity of the stage. Due to a larger enlargement ratio of the amplifier of bridge type and prismatic joints with good decoupling property, the XYZ micro/nano-positioning stage exhibits a large almost-decoupled motion along three working axes. Moreover, the application of modular design reduces the cost for repair and replacing. The capacities of the reported design are validated by performing simulation study.

DOI10.1109/ICARM.2016.7606946
URLView the original
Indexed BySCIE
WOS Research AreaEngineering ; Robotics
WOS SubjectEngineering, Electrical & Electronic ; Robotics
WOS IDWOS:000386653600062
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Cited Times [WOS]:0   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology University of Macau
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Xiaozhi Zhang,Qingsong Xu. Design and analysis of an in-plane flexure XYZ micro/nano-positioning stage[C],2016:359-363.
APA Xiaozhi Zhang,&Qingsong Xu.(2016).Design and analysis of an in-plane flexure XYZ micro/nano-positioning stage.ICARM 2016 - 2016 International Conference on Advanced Robotics and Mechatronics,359-363.
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