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Design of a flexure-based XY precision positioning stage with constant force output
Piyu Wang; Qingsong Xu
2016-12-22
Conference Name42nd Annual Conference of the IEEE-Industrial-Electronics-Society (IECON)
Source PublicationIECON Proceedings (Industrial Electronics Conference)
Pages524-529
Conference Date23-26 Oct. 2016
Conference PlaceFlorence, Italy
Author of SourceIEEE
Publication Place345 E 47TH ST, NEW YORK, NY 10017 USA
PublisherIEEE
Abstract

This paper presents the design of a compact flexure-based parallel-kinematics XY precision positioning stage with constant-force output. One uniqueness of the stage is that it can produce a constant output force without using a force controller. The stage mechanism is devised using leaf flexures to achieve decoupled structures with positive stiffness. Bistable beams are used as negative-stiffness structures. By combining two negative beams and four leaf flexures, a zero-stiffness mechanism is devised. Analytical model of the zero-stiffness structure is established and verified by carrying out finite-element simulation studies. Afterwards, the structure parameters are carefully designed to cater for the requirements on the range, stiffness, resonant frequency, and payload capabilities. The parametric design is verified by conducting finite-element analysis, which reveals a sufficient reachable constant-force motion rang about 700 μm in each working axis along with better performance in other aspects.

KeywordCompliant Mechanisms Constant-force Output Mechanism Design Micropositioning
DOI10.1109/IECON.2016.7793662
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic
WOS IDWOS:000399031200088
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Cited Times [WOS]:4   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology University of Macau
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Piyu Wang,Qingsong Xu. Design of a flexure-based XY precision positioning stage with constant force output[C]//IEEE. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2016:524-529.
APA Piyu Wang,&Qingsong Xu.(2016).Design of a flexure-based XY precision positioning stage with constant force output.IECON Proceedings (Industrial Electronics Conference),524-529.
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