UM  > Faculty of Science and Technology  > DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Mems microgripper actuators and sensors: The state-of-the-art survey
Jia Y.; Xu Q.
2013
Source PublicationRecent Patents on Mechanical Engineering
ISSN1874477X
Volume6Issue:2Pages:132
Abstract

In recent years, microelectromechanical systems (MEMS) have been widely applied in diverse science and engineering domains. MEMS-based microgrippers provide advantages in terms of compact size and low cost, and hence play an important role in microassembly and micromanipulation fields for manipulating micromechanical elements, biological cells, etc. During the past two decades, microactuators based on different actuation principles such as shape-memory alloys, electrostatic, electrothermal, piezoelectric, pneumatic and electromagnetic approaches have been devised to drive MEMS microgrippers. Moreover, the integrated position and force sensors can deliver real-time feedback signals to protect both the microgripper and grasped object from damaging. In addition, a number of patents have been devoted to this area. This paper presents a state-of-the-art overview of recent development in the actuators (electrostatic, electrothermal, micro-pneumatic, electromagnetic, shape memory alloy and other actuators) and sensors (optical method, piezoresistive force sensor, capacitive force sensor and other developments). By providing detailed comparisons among them, some guidelines of selection have been underlined for different application scenarios such as biomedical and biological applications, micro-manufacturing and so on. © 2013 Bentham Science Publishers.

KeywordForce Feedback Force Sensor Mems Microactuator Microgripper Micromanipulation
URLView the original
Language英语
The Source to ArticleScopus
Fulltext Access
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversity of Macau, Taipa, Macao
First Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Jia Y.,Xu Q.. Mems microgripper actuators and sensors: The state-of-the-art survey[J]. Recent Patents on Mechanical Engineering,2013,6(2):132.
APA Jia Y.,&Xu Q..(2013).Mems microgripper actuators and sensors: The state-of-the-art survey.Recent Patents on Mechanical Engineering,6(2),132.
MLA Jia Y.,et al."Mems microgripper actuators and sensors: The state-of-the-art survey".Recent Patents on Mechanical Engineering 6.2(2013):132.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Jia Y.]'s Articles
[Xu Q.]'s Articles
Baidu academic
Similar articles in Baidu academic
[Jia Y.]'s Articles
[Xu Q.]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Jia Y.]'s Articles
[Xu Q.]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.