UM
Design of a Compact 1-Dof Piezo-Driven Flexure Stage for Vertical Micro/Nano-Positioning
Wu,Zeyi; Xu,Qingsong
2019-04-10
Source Publication8th Annual IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, CYBER 2018
Pages208-213
AbstractThis paper presents the design of a new compact 1-DOF compliant stage driven by a piezoelectric actuator (PEA)for micro/nano-positioning in vertical direction. In order to fulfill the design requirement and to improve the compactness and output directionality of the stage, a series of design processes are presented. In particular, an orthogonal compound bridge-type (OCBT)amplifier is introduced to amplify the displacement of the PEA. It can significantly reduce the height of the stage, leading to a compact design. The design variables are determined by analyzing the mechanism. These design variables are optimized by multi-objective genetic algorithm (MOGA)based on finite-element analysis (FEA). The optimal design results in the stage dimension of 58 × 20 × 15.5 mm. Performance evaluation is conducted by FEA analysis. Results show that the 1-DOF stage is able to provide a maximum displacement of 181.18 μm, which is more than 12 times the input displacement of PEA. Payload testing results indicate the stage can support a maximum load of about 80 N.
DOI10.1109/CYBER.2018.8688098
URLView the original
Language英语
Scopus ID2-s2.0-85064989836
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Document TypeConference paper
CollectionUniversity of Macau
AffiliationFaculty of Science and Technology,University of Macau,Avenida da Universidade,Department of Electromechanical Engineering,Taipa, Macau,China
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Wu,Zeyi,Xu,Qingsong. Design of a Compact 1-Dof Piezo-Driven Flexure Stage for Vertical Micro/Nano-Positioning[C],2019:208-213.
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