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Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator
Hanlun Zhang; Qingsong Xu
2020-02-13
Conference NameIEEE Conference on Nanotechnology
Source PublicationProceedings of the IEEE Conference on Nanotechnology
Volume2019-July
Pages188-192
Conference Date22-26 July 2019
Conference PlaceMacao
CountryChina
Abstract

This paper presents the design of a new rotary micropositioning stage, which is actuated by a linear-type piezoelectric stack actuator. This structure realizes a large enough output angle by introducing lever displacement amplifiers. This work also includes innovative designs for accepting the force and displacement of PZT. Moreover, it avoids undesired displacement by adopting symmetrical structure design. The proposed design also exhibits a compact structure, which provides convenience in practical application. Finite-element analysis is conducted with simulation study to verify the performance of the presented rotary micropositioning stage.

DOI10.1109/NANO46743.2019.8993869
URLView the original
Language英語English
Scopus ID2-s2.0-85081052682
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Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationUniversity of Macau,Department of Electromechanical Engineering,Faculty of Science and Technology,Macao
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Hanlun Zhang,Qingsong Xu. Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator[C],2020:188-192.
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