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Design of a Flexure XY Micropositioning Stage with Large Hollow Platform
Hanlun Zhang; Zehao Wu; Qingsong Xu
2021
Conference NameInternational Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
Source PublicationProceedings of MARSS 2020: International Conference on Manipulation, Automation, and Robotics at Small Scales
Conference Date13-17 July 2020
Conference PlaceToronto
CountryCanada
Abstract

This paper presents the design of a new flexure-based XY micropositioning stage with a large hollow platform, which is suitable for practical use with a microscope. The designed mechanism has a parallel-kinematic structure and is actuated by two voice coil motors. By employing multistage compound parallelogram flexures (MCPF), the stage is designed as a four-layer structure, which produces a motion output platform with a large hollow space and large motion range. Analytical modeling is carried out for the parametric design of the stage. Evaluation results show that the designed XY stage exhibits a large safety factor and high natural frequency. Moreover, the large hollow platform is well-suited for practical application with a microscope.

DOI10.1109/MARSS49294.2020.9307915
URLView the original
Language英語English
Scopus ID2-s2.0-85099568537
Fulltext Access
Citation statistics
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversity of Macau,Avenida da Universidade,Taipa,Faculty of Science and Technology,Department of Electromechanical Engineering,Macao
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Hanlun Zhang,Zehao Wu,Qingsong Xu. Design of a Flexure XY Micropositioning Stage with Large Hollow Platform[C],2021.
APA Hanlun Zhang,Zehao Wu,&Qingsong Xu.(2021).Design of a Flexure XY Micropositioning Stage with Large Hollow Platform.Proceedings of MARSS 2020: International Conference on Manipulation, Automation, and Robotics at Small Scales.
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