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Design of a new XY flexure micropositioning stage with a large hollow platform
Hanlun Zhang; ehao Wu; Qingsong Xu
2020-08-03
Source PublicationActuators
ISSN2076-0825
Volume9Issue:3
Abstract

This paper presents the design of a new flexure-based xy micropositioning stage with a large hollow platform, which is suitable for practical use with a microscope. The designed mechanism has a parallel-kinematic structure and is actuated by two voice coil motors. By employing multistage compound parallelogram flexures, the stage is designed as a four-layer structure, which produces a motion output platform with a large hollow space and large range of motion. Analytical modeling was carried out for parametric design of the stage. Evaluation results show that the designed xy stage exhibits a large safety factor and high natural frequency. Moreover, the large hollow platform is well-suited for practical applications with a microscope.

KeywordCompliant Mechanism Flexure Mechanism Mechanical Design Micropositioning
DOI10.3390/ACT9030065
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering ; Instruments & Instrumentation
WOS SubjectEngineering, Mechanical ; Instruments & Instrumentation
WOS IDWOS:000580554800001
Scopus ID2-s2.0-85089854509
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Cited Times [WOS]:0   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering,Faculty of Science and Technology,University of Macau,Taipa,Avenida da Universidade,Macao
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Hanlun Zhang,ehao Wu,Qingsong Xu. Design of a new XY flexure micropositioning stage with a large hollow platform[J]. Actuators,2020,9(3).
APA Hanlun Zhang,ehao Wu,&Qingsong Xu.(2020).Design of a new XY flexure micropositioning stage with a large hollow platform.Actuators,9(3).
MLA Hanlun Zhang,et al."Design of a new XY flexure micropositioning stage with a large hollow platform".Actuators 9.3(2020).
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