UM
Design and Modeling of a Novel 3-DOF Large-Travel Parallel Micro/Nano-Positioning Stage
Zhang, Xiaozhi; Xu, Qingsong; IEEE
2017
Conference NameIECON 2017 - 43RD ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY
Pages2840-2845
Publication Place345 E 47TH ST, NEW YORK, NY 10017 USA
PublisherIEEE
AbstractLimited travel constrains the widely application of XYZ parallel micro/nano-positioning stage. In this paper, a novel parallel-kinematics micro/nano-positioning stage is proposed with the goal of enlarging the travel range. In order to obtain a large input displacement for actuating the stage, voice coil motors (VCM) are adopted. For a large-travel parallel stage, the cross-axis motion increases the difficulty of closed loop control process. Thus, the I-shaped flexure hinges are employed to decouple the parallel stage's motion. In view of the lower output force of the VCM, the guiding flexure mechanism is designed with an optimized sectional dimension of 140 mm x 44 mm. To verify the performance of the stage, analytical modeling and simulation study are conducted. Results show that the proposed large-travel parallel micro/nano-positioning stage owns the 3-DOF motion range of 3.527 mm, an oversize of 176 mm x 176 mm x 198 mm, and negligible isolation ratio of 0.0034%.
URLView the original
Indexed ByCPCI
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Industrial ; Engineering, Electrical & Electronic
WOS IDWOS:000427164802135
The Source to ArticleWOS
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Cited Times [WOS]:0   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionUniversity of Macau
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GB/T 7714
Zhang, Xiaozhi,Xu, Qingsong,IEEE. Design and Modeling of a Novel 3-DOF Large-Travel Parallel Micro/Nano-Positioning Stage[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2017:2840-2845.
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