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Design of a Compact 1-DOF Piezo-Driven Flexure Stage for Vertical Micro/Nano- Positioning
Zeyi Wu; Qingsong Xu
2019-04-11
Conference Name2018 IEEE 8th Annual International Conference on CYBER Technology in Automation, Control, and Intelligent Systems (CYBER)
Source Publication2018 IEEE 8th Annual International Conference on CYBER Technology in Automation, Control, and Intelligent Systems (CYBER)
Conference Date19-23 July 2018
Conference PlaceTianjin, China, China
Abstract

This paper presents the design of a new compact 1- DOF compliant stage driven by a piezoelectric actuator (PEA) for micro/nano-positioning in vertical direction. In order to fulfill the design requirement and to improve the compactness and output directionality of the stage, a series of design processes are presented. In particular, an orthogonal compound bridge-type (OCBT) amplifier is introduced to amplify the displacement of the PEA. It can significantly reduce the height of the stage, leading to a compact design. The design variables are determined by analyzing the mechanism. These design variables are optimized by multi-objective genetic algorithm (MOGA) based on finite-element analysis (FEA). The optimal design results in the stage dimension of 58×20×15.5 mm3. Performance evaluation is conducted by FEA analysis. Results show that the 1-DOF stage is able to provide a maximum displacement of 181.18 μm, which is more than 12 times the input displacement of PEA. Payload testing results indicate the stage can support a maximum load of about 80 N.

DOI10.1109/CYBER.2018.8688098
Language英語English
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Document TypeConference paper
CollectionFaculty of Science and Technology
Affiliationthe Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Zeyi Wu,Qingsong Xu. Design of a Compact 1-DOF Piezo-Driven Flexure Stage for Vertical Micro/Nano- Positioning[C],2019.
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