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Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage
Zeyi Wu; Qingsong Xu
Conference Name2018 IEEE International Conference on Robotics and Biomimetics (ROBIO)
Source Publication2018 IEEE International Conference on Robotics and Biomimetics (ROBIO)
Conference Date12-15 Dec. 2018
Conference PlaceKuala Lumpur, Malaysia, Malaysia

This paper presents the design and optimization of a symmetrical compliant XYZ parallel stage for micro-/nanopositioning, which is driven by three piezoelectric actuators (PEAs). A compact design is devised by introducing serialparallel 3-DOF decoupling unit and spatial compound bridgetype amplifiers. Structural parameter optimization has been conducted via finite-element analysis (FEA)-based multi-objective genetic algorithm, which produces a compact physical size of the XYZ stage. The performance of the optimized XYZ stage under different loads are evaluated by FEA simulation study. Under free-load condition, the stage is able to provide a workspace of 143.10×143.12×135.18 μm3. The maximum horizontal cross-axis error is only 0.01%, while the vertical cross-axis error is 5.54%, which is caused by the gravity effect. The loading test result reveals that the maximum bearable load of the stage is up to 74.46 N, i.e., 7.6 kg.

KeywordMicro-/nano-positioning Compliant Mechanism Piezoelectric Actuator Parallel Kinematics Mechanism Design
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Document TypeConference paper
CollectionFaculty of Science and Technology
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology University of Macau Macao, China
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Zeyi Wu,Qingsong Xu. Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage[C],2018.
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