UM
Characterization of MOCVD grown optical coatings of Sc 2 O 3 and Ta-doped SnO 2
Lee S.W.2; Daga A.2; Xu Z.K.1; Chen H.2
2003-05-25
Source PublicationMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume99
Issue1-3
Pages134-137
AbstractMOCVD method has been used to grow optical coatings: Sc O is a high index transparent coating while Ta-doped SnO is a transparent conductive oxide. Both films show dense packing and excellent properties. The influence of deposition temperature on the microstructure evolution and optical properties of Sc O films was investigated by X-ray diffraction, scanning electron microscopy and spectrophotometry. Nanocrystalline films were obtained with low transmittance but high refractive index and hardness. Ta-doped SnO films showed sharp change of conductivity with Ta doping, which is attributed to the increase of electron carrier concentration. Improved crystallinity contributes to the improvement in the mobility among doped samples. Microstructural evaluation and property relationships are discussed. © 2002 Elsevier Science B.V. All rights reserved.
KeywordMOCVD Sc 2 O 3 Ta-doped SnO 2
DOI10.1016/S0921-5107(02)00503-2
URLView the original
Language英語
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Cited Times [WOS]:5   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionUniversity of Macau
Affiliation1.City University of Hong Kong
2.University of Illinois at Urbana-Champaign
Recommended Citation
GB/T 7714
Lee S.W.,Daga A.,Xu Z.K.,et al. Characterization of MOCVD grown optical coatings of Sc 2 O 3 and Ta-doped SnO 2[C],2003:134-137.
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