UM
High-resolution transmission electron microscopy investigation of the nanostructure of nanocrystalline pulsed laser deposition SnO2 thin films
Chen Z.; Lai J.K.L.; Shek C.H.; Chen H.
2005-05-04
Source PublicationJournal of the Australasian Ceramic Society
ISSN10186689
Volume41Issue:1Pages:22-25
AbstractPulsed laser deposition (PLD) was used to grow nanocrystalline SnO thin films into glass substrates. The nanocrystallines and microstructure performances of SnO thin films grown by PLD techniques have been shown to be highly sensitive to the deposition conditions. The reactive PLD process was carried out at room temperature under the working pressure of about 2 × 10 mbar. Experimental results indicate the PLD deposition under vacuum is found to produce thin films that are composed of both a polycrystalline SnO phase and an amorphous SnO phase. In particular, the presence of such an amorphous SnO phase in the thin films greatly limits their practical use as gas-sensing devices. High-resolution transmission electron microscopy (HRTEM) observations revealed that the SnO nanocrystallines with tetragonal rutile structure embed in an amorphous SnO matrix, and tend to be in quasi-spherical shape. This quasi-spherical SnO nanocrystalline contains a high density of defects, such as twin boundaries and edge dislocations. The microstructure of the thin films is highly sensitive to their PLD conditions.
KeywordNanocrystalline Pulsed laser deposition Thin film
URLView the original
Language英語
Fulltext Access
Document TypeJournal article
CollectionUniversity of Macau
AffiliationCity University of Hong Kong
Recommended Citation
GB/T 7714
Chen Z.,Lai J.K.L.,Shek C.H.,et al. High-resolution transmission electron microscopy investigation of the nanostructure of nanocrystalline pulsed laser deposition SnO2 thin films[J]. Journal of the Australasian Ceramic Society,2005,41(1):22-25.
APA Chen Z.,Lai J.K.L.,Shek C.H.,&Chen H..(2005).High-resolution transmission electron microscopy investigation of the nanostructure of nanocrystalline pulsed laser deposition SnO2 thin films.Journal of the Australasian Ceramic Society,41(1),22-25.
MLA Chen Z.,et al."High-resolution transmission electron microscopy investigation of the nanostructure of nanocrystalline pulsed laser deposition SnO2 thin films".Journal of the Australasian Ceramic Society 41.1(2005):22-25.
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