UM
Production of amorphous tin oxide thin films and microstructural transformation induced by heat treatment
Chen Z.W.; Lai J.K.L.; Shek C.H.; Chen H.D.
2005-10-01
Source PublicationApplied Physics A: Materials Science and Processing
ISSN09478396
Volume81Issue:5Pages:1073-1076
AbstractX-ray diffraction, scanning electron microscopy, transmission electron microscopy, and high resolution transmission electron microscopy were used to study tin oxide thin films deposited on Si(100) substrates at room temperature using pulsed laser deposition techniques with a sintered cassiterite SnO target and subsequently heat-treated. X-ray diffraction and scanning electron microscopy results demonstrated that the as-prepared thin films consisted of an amorphous matrix as well as plume-like features, which are shown many micropores. The thin films that were heat treated for 2 h at 150 °C had tetragonal rutile nanocrystalline SnO structures. The microstructural evolution of the tin oxide thin films during the heat treatment is discussed in the paper. © Springer-Verlag 2004.
DOI10.1007/s00339-004-2955-9
URLView the original
Language英語
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Cited Times [WOS]:18   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
AffiliationCity University of Hong Kong
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Chen Z.W.,Lai J.K.L.,Shek C.H.,et al. Production of amorphous tin oxide thin films and microstructural transformation induced by heat treatment[J]. Applied Physics A: Materials Science and Processing,2005,81(5):1073-1076.
APA Chen Z.W.,Lai J.K.L.,Shek C.H.,&Chen H.D..(2005).Production of amorphous tin oxide thin films and microstructural transformation induced by heat treatment.Applied Physics A: Materials Science and Processing,81(5),1073-1076.
MLA Chen Z.W.,et al."Production of amorphous tin oxide thin films and microstructural transformation induced by heat treatment".Applied Physics A: Materials Science and Processing 81.5(2005):1073-1076.
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