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Enhanced dielectric tunability properties of Ba(ZrxTi1-x)O3 thin films using seed layers on Pt/Ti/SiO2/Si substrates
Zhai J.1; Gao C.1; Yao X.1; Xu Z.2; Chen H.2
2008-05-01
Source PublicationCeramics International
ISSN02728842
Volume34Issue:4Pages:905-910
AbstractThe compositionally graded and homogeneous Ba(ZrTi)O (BZT) thin films were fabricated on LaNiO (LNO) buffered Pt/Ti/SiO/Si and Pt/Ti/SiO/Si substrates by a sol-gel deposition method, respectively. These films crystallized into a single perovskite phase. The BZT thin films deposited on LaNiO/Pt/Ti/SiO/Si substrates had a highly (1 0 0) preferred orientation and exhibited a preferred (1 1 0) orientation when the thin films were deposited on Pt/Ti/SiO/Si substrates. The LNO and Ba(ZrTi) served as seed layer on Pt/Ti/SiO/Si substrates and analyze the relationship of seed layer, microstructure and dielectric behavior of the thin films. The compositionally graded thin films from BaTiO to BaZrTiO were fabricated on LNO/Pt/Ti/SiO/Si substrates. The tunability behavior of compositionally graded films was analyzed in order to produce optimum effective dielectric properties. The dielectric constant of BaZrTiO compositionally graded thin films showed weak temperature dependence. This kind of thin films has a potential in a fabrication of a temperature stable tunable device. © 2007 Elsevier Ltd and Techna Group S.r.l.
KeywordA. Films A. Sol-gel processes C. Dielectric properties Microstructure
DOI10.1016/j.ceramint.2007.10.001
URLView the original
Language英語English
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Cited Times [WOS]:16   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
Affiliation1.Tongji University
2.City University of Hong Kong
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Zhai J.,Gao C.,Yao X.,et al. Enhanced dielectric tunability properties of Ba(ZrxTi1-x)O3 thin films using seed layers on Pt/Ti/SiO2/Si substrates[J]. Ceramics International,2008,34(4):905-910.
APA Zhai J.,Gao C.,Yao X.,Xu Z.,&Chen H..(2008).Enhanced dielectric tunability properties of Ba(ZrxTi1-x)O3 thin films using seed layers on Pt/Ti/SiO2/Si substrates.Ceramics International,34(4),905-910.
MLA Zhai J.,et al."Enhanced dielectric tunability properties of Ba(ZrxTi1-x)O3 thin films using seed layers on Pt/Ti/SiO2/Si substrates".Ceramics International 34.4(2008):905-910.
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