UM
Development of a novel large stroke 2-DOF micromanipulator for micro/nano manipulation
Xiao, Xiao; Li, Yangmin; Xiao, Shunli
2017-07
Source PublicationMICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
ISSN0946-7076
Volume23Issue:7Pages:2993-3003
AbstractAn electromagnetic actuated XY micromanipulator with completely decoupled characteristics is proposed in this paper. The design process, stiffness and kinematics analysis, and experimental study are performed. In order to improve the accuracy and decoupling performance, contact surface deformations, tensile and compression deformations of the flexures are taken into consideration. The mathematic models in terms of stiffness and kinematics models are derived based on the matrix displacement method, and then validated by using ANSYS and MATLAB software. A prototype is fabricated, and electromagnetic actuator is adopted due to the merits of low-cost, large stroke and non-contact driving. Each axis of the manipulator is driven by two actuators, so the end-effector can realize four quadrant motions. On account of model uncertainty, a repetitive controller is introduced. Open-loop and closed-loop experiments are conducted. Experimental results indicate that the proposed manipulator can be widely used in micro/nano positioning and manipulation applications.
DOI10.1007/s00542-016-2991-3
URLView the original
Indexed BySCIE
Language英语
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS IDWOS:000404149800067
PublisherSPRINGER
The Source to ArticleWOS
Fulltext Access
Citation statistics
Cited Times [WOS]:15   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
Recommended Citation
GB/T 7714
Xiao, Xiao,Li, Yangmin,Xiao, Shunli. Development of a novel large stroke 2-DOF micromanipulator for micro/nano manipulation[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2017,23(7):2993-3003.
APA Xiao, Xiao,Li, Yangmin,&Xiao, Shunli.(2017).Development of a novel large stroke 2-DOF micromanipulator for micro/nano manipulation.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,23(7),2993-3003.
MLA Xiao, Xiao,et al."Development of a novel large stroke 2-DOF micromanipulator for micro/nano manipulation".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 23.7(2017):2993-3003.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Xiao, Xiao]'s Articles
[Li, Yangmin]'s Articles
[Xiao, Shunli]'s Articles
Baidu academic
Similar articles in Baidu academic
[Xiao, Xiao]'s Articles
[Li, Yangmin]'s Articles
[Xiao, Shunli]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Xiao, Xiao]'s Articles
[Li, Yangmin]'s Articles
[Xiao, Shunli]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.