| Synthesis and properties of crystalline TiO 2 films deposited by a HIPIMS technique | |
| Wang Q.M.1; Kwon S.-H.1; Hui K.N.1; Kim D.-I.1; Hui K.S.2; Kim K.H.1 | |
| 2013-03-01 | |
| Source Publication | Vacuum |
| Volume | 89 |
| Issue | 1 |
| Pages | 90-95 |
| Abstract | Crystalline TiO thin films were synthesized on the Si and glass substrates by reactive sputtering in a HIPIMS coating system. The films with a bit oxygen deficiency were deposited on the Si and glass substrates at oxygen flux rate of 10 sccm. The phase structure of the films changed with varying the parameters the MPP power pulse, the bias voltage, and working gas pressure. Anatase-dominant, anatase-rutile, and rutile films can be obtained by controlling the deposition parameters. The anatase-dominant and anatase-rutile TiO films possess good photoinduced hydrophilicity and photocatalytic properties. The rutile films exhibited high dielectric constant. The related mechanism and potential application was discussed. © 2011 Elsevier Ltd. All rights reserved. |
| Keyword | Dielectric constant High power impulse magnetron sputtering Phase structure Photocatalytic properties TiO 2film |
| DOI | 10.1016/j.vacuum.2011.11.020 |
| URL | View the original |
| Language | 英語 |
| Fulltext Access | |
| Citation statistics | |
| Document Type | Conference paper |
| Collection | University of Macau |
| Affiliation | 1.Pusan National University 2.City University of Hong Kong 3.Guangdong University of Technology |
| Recommended Citation GB/T 7714 | Wang Q.M.,Kwon S.-H.,Hui K.N.,et al. Synthesis and properties of crystalline TiO 2 films deposited by a HIPIMS technique[C],2013:90-95. |
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