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Design and development of a new large-stroke XY compliant micropositioning stage Journal article
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 2017,Volume: 231,Issue: 17,Page: 3263-3276
作者:  Wan, Sicong;  Zhang, Yulong;  Xu, Qingsong
收藏  |  浏览/下载:11/0  |  提交时间:2018/10/30
Micropositioning Stage  Pseudo-rigid-body Model  Roberts Mechanisms  Translational Flexure Bearing  Finite-element Analysis  Proportional-integral-derivative Control