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Residual stress measurement on TiN thin films by combing nanoindentation and average X-ray strain (AXS) method Journal article
Surface and Coatings Technology, 2015,Volume: 280,Page: 43-49
Authors:  Wang A.-N.;  Huang J.-H.;  Hsiao H.-W.;  Yu G.-P.;  Chen H.
Favorite | View/Download:6/0 | TC[WOS]:11 TC[Scopus]:14 | Submit date:2019/04/08
Average X-ray strain (AXS)  Cos2αsin2ψ method  Nanoindentation  Residual stress  TiN thin film