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Resorcinol-formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor Journal article
Sensors and Actuators, B: Chemical, 2015,Volume: 214,Page: 181-188
Authors:  Chung V.P.J.;  Yip M.-C.;  Fang W.
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CMOS-MEMS  Humidity sensor  Resorcinol-formaldehyde aerogels  
A CMOS capacitive vertical-parallel-plate-array humidity sensor with RF-aerogel fill-in for sensitivity and response time improvement Conference paper
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Authors:  Chung V.P.J.;  Cheng C.-L.;  Yip M.-C.;  Fang W.
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Capacitive sensor  CMOS MEMS  Humidity sensor  RF-aerogel  Vertical-parallel-plate array  
Development of a CMOS-MEMS RF-aerogel-based capacitive humidity sensor Conference paper
Proceedings of IEEE Sensors
Authors:  Chung V.P.J.;  Liang J.K.-C.;  Cheng C.-L.;  Yip M.-C.;  Fang W.
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Capacitive transducer  CMOS MEMS  RF-aerogel humidity sensor