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Document Type:会议论文
Source Publication:2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2014 - Conference Proceedings
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Design of a new compliant XY micro-positioning stage based on Roberts mechanism
Conference paper
2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2014 - Conference Proceedings, Taipei, TAIWAN, OCT 27-31, 2014
Authors:
Wan S.
;
Xu Q.
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Submit date:2018/12/23
Compliant Mechanism
Micro-positioning
Pseudo Rigid Body Model (Prbm)
Roberts Mechanisms
Xy Stage