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Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer Journal article
SMALL, 2017,Volume: 13,Issue: 44
Authors:  Liang, Binghao;  Chen, Wenjun;  He, Zhongfu;  Yang, Rongliang;  Lin, Zhiqiang;  Du, Huiwei;  Shang, Yuanyuan;  Cao, Anyuan;  Tang, Zikang;  Gui, Xuchun
Favorite  |  View/Download:30/0  |  Submit date:2018/10/30
carbon nanotubes  contact resistance  photoresist  piezoresistive pressure sensor