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An accurate design to calculate and measure the capacitance of CMUT for pressure sensors Conference paper
2016 IEEE International Conference on Consumer Electronics-China, ICCE-China 2016
Authors:  Wang J.;  Yu Y.;  Pun S.H.;  Gao Y.;  Che U.K.;  Mak P.U.
Favorite  |  View/Download:1/0  |  Submit date:2019/02/14
capacitance  CMUT  deflection profile  pressure sensor