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A novel piezoactuated XY stage with parallel, decoupled, and stacked flexure structure for micro-/nanopositioning Journal article
IEEE Transactions on Industrial Electronics, 2011,Volume: 58,Issue: 8,Page: 3601
作者:  Li Y.;  Xu Q.
收藏  |  浏览/下载:2/0  |  提交时间:2018/10/30
Flexure Mechanisms  Hysteresis Modeling  Mechanism Design  Micro-/nanopositioning  Motion Control