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Design and development of a flexure-based dual-stage nanopositioning system with minimum interference behavior Journal article
IEEE Transactions on Automation Science and Engineering, 2012,Volume: 9,Issue: 3,Page: 554
作者:  Xu Q.
收藏  |  浏览/下载:13/0  |  提交时间:2018/10/30
Decoupling Design  Dual-servo System (Dss)  Flexure Mechanisms  Micro-/nanopositioning  Motion Control