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A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nanomanipulation Journal article
IEEE Transactions on Automation Science and Engineering, 2011,Volume: 8,Issue: 2,Page: 265
Authors:  Li Y.;  Xu Q.
Favorite  |  View/Download:7/0  |  Submit date:2018/10/30
Finite-element Analysis (Fea)  Flexure Mechanisms  Mechanism Design  Micro/nanopositioning  Motion Control  Parallel Manipulators  Piezoelectric Hysteresis