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Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage Conference paper
2018 IEEE International Conference on Robotics and Biomimetics (ROBIO), Kuala Lumpur, Malaysia, Malaysia, 12-15 Dec. 2018
Authors:  Zeyi Wu;  Qingsong Xu
Favorite  |  View/Download:5/0  |  Submit date:2019/04/23
Micro-/nano-positioning  Compliant Mechanism  Piezoelectric Actuator  Parallel Kinematics  Mechanism Design