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Mechanism design of a compact XYZ parallel flexure stage Conference paper
2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics, Lijiang, PEOPLES R CHINA, AUG 08-10, 2015
Authors:  Zhang X.;  Xu Q.
Favorite  |  View/Download:4/0  |  Submit date:2018/12/23
Decouple  Fea Simulation  Flexure Hinge  Two-stage Amplifier  Xyz Nano-positioning Stage