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Design of a new decoupled compliant xyz parallel-kinematic nanopositioning stage Conference paper
IEEE Region 10 Annual International Conference, Proceedings/TENCON, Macao, PEOPLES R CHINA, NOV 01-04, 2015
Authors:  Zhang X.;  Xu Q.
Favorite  |  View/Download:2/0  |  Submit date:2018/12/23
Decoupling  Fea Simulation  Flexure Hinges  Nanopositioning Stage  Vcms