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Design of a new flexure-based XYZ parallel nanopositioning stage Conference paper
2015 IEEE International Conference on Robotics and Biomimetics, IEEE-ROBIO 2015, Zhuhai, PEOPLES R CHINA, DEC 06-09, 2015
作者:  Zhang X.;  Xu Q.
收藏  |  浏览/下载:1/0  |  提交时间:2018/12/23
3-dof Nanopositioning Stage  Decoupling  Fea Simulation  Ppr Joint  Two-stacked Amplifier  
Design of a new 5-DOF flexure-based nanopositioning stage Conference paper
2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xian, PEOPLES R CHINA, APR 07-11, 2015
作者:  Zhang X.;  Xu Q.
收藏  |  浏览/下载:10/0  |  提交时间:2018/12/23
Compliant Mechanism  Flexure Mechanism  Nanopositioning  Piezoelectric Actuation