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Design of a new 5-DOF flexure-based nanopositioning stage Conference paper
2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xian, PEOPLES R CHINA, APR 07-11, 2015
Authors:  Zhang X.;  Xu Q.
Favorite  |  View/Download:10/0  |  Submit date:2018/12/23
Compliant Mechanism  Flexure Mechanism  Nanopositioning  Piezoelectric Actuation