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Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer Journal article
SMALL, 2017,Volume: 13,Issue: 44
Authors:  Liang, Binghao;  Chen, Wenjun;  He, Zhongfu;  Yang, Rongliang;  Lin, Zhiqiang;  Du, Huiwei;  Shang, Yuanyuan;  Cao, Anyuan;  Tang, Zikang;  Gui, Xuchun
Favorite  |  View/Download:27/0  |  Submit date:2018/10/30
carbon nanotubes  contact resistance  photoresist  piezoresistive pressure sensor  
Engineering superlyophobic surfaces on curable materials based on facile and inexpensive microfabrication Conference paper
17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
Authors:  Yuan L.;  Zhang W.;  Tang Z.;  Wu T.;  Zhang L.;  Luan L.
Favorite  |  View/Download:1/0  |  Submit date:2019/04/08
Micro electromechanical systems (MEMS)  Soft replication  Superlyophobic surfaces (SLS)  Wetting