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A compliant parallel XY micromotion stage with complete kinematic decoupling Journal article
IEEE Transactions on Automation Science and Engineering, 2012,Volume: 9,Issue: 3,Page: 538
Authors:  Li Y.;  Huang J.;  Tang H.
Favorite  |  View/Download:7/0  |  Submit date:2018/10/30
Flexure hinge  micromotion stage  piezoelectric actuation  Preisach model