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Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure Conference paper
2017 2nd International Conference on Advanced Robotics and Mechatronics, ICARM 2017, Hefei, China, 27-31 Aug. 2017
作者:  Wu Z.;  Xu Q.
收藏  |  浏览/下载:4/0  |  提交时间:2018/12/23
Fea Analysis  Mechanism Design  Micro/nano-positioning  Parameter Optimization  Stacked Structure