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Design of a new flexure-based XYZ parallel nanopositioning stage Conference paper
2015 IEEE International Conference on Robotics and Biomimetics, IEEE-ROBIO 2015, Zhuhai, PEOPLES R CHINA, DEC 06-09, 2015
作者:  Zhang X.;  Xu Q.
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3-dof Nanopositioning Stage  Decoupling  Fea Simulation  Ppr Joint  Two-stacked Amplifier