UM
Deuterium-oxygen exchange on diamond (100)-A study by ERDA, RBS and TOF-SIMS
Loh K.P.1; Xie X.N.1; Zhang X.1; Teo E.J.1; Osipowicz T.1; Lai M.Y.2; Yakovlev N.2
2002-07-01
Source PublicationDiamond and Related Materials
ISSN09259635
Volume11Issue:7Pages:1385-1390
AbstractThe exchange of radio-frequency plasma-excited atomic O with chemisorbed D, and vice versa, on single crystalline diamond (100) 2 × 1 has been investigated by elastic recoil detection analysis (ERDA), Rutherford backscattering spectrometry (RBS) and time-of-flight secondary ion mass spectrometry (TOF-SIMS). It was found that the O-D, as well as D-O, exchange processes were thermally activated by the diamond substrate. The surface D was only partially exchanged by atomic O at room temperature. At elevated temperatures, the replacement of D by O was greatly enhanced, with 80% substitution by O at 300°C. It was also observed that the uptake of O proceeded more readily on the pre-deuterated surface compared to the clean surface. Ultra-shallow depth profiling revealed that atomic beam treatment of single crystalline samples at 800°C resulted in only superficial uptake of D and O, with no surface incorporation within the shallow analysis depth. The replacement of pre-adsorbed O by RF-excited atomic D was also studied by TOF-SIMS. Pre-adsorbed O was relatively stable and resisted removal at 300°C. D dosed onto the oxygenated surface was found to co-adsorb with O, possibly as surface bound OD species. Mechanisms for the O-D and D-O exchange processes were discussed in connection with the atomic structure of the C(100) surface. © 2002 Elsevier Science B.V. All rights reserved.
KeywordAtomic oxygen Deuterium Rutherford backscattering Time-of-flight secondary ion mass spectrometry
DOI10.1016/S0925-9635(02)00015-8
URLView the original
Language英語
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Cited Times [WOS]:6   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
Affiliation1.National University of Singapore
2.A-Star, Institute of Materials Research and Engineering
Recommended Citation
GB/T 7714
Loh K.P.,Xie X.N.,Zhang X.,et al. Deuterium-oxygen exchange on diamond (100)-A study by ERDA, RBS and TOF-SIMS[J]. Diamond and Related Materials,2002,11(7):1385-1390.
APA Loh K.P..,Xie X.N..,Zhang X..,Teo E.J..,Osipowicz T..,...&Yakovlev N..(2002).Deuterium-oxygen exchange on diamond (100)-A study by ERDA, RBS and TOF-SIMS.Diamond and Related Materials,11(7),1385-1390.
MLA Loh K.P.,et al."Deuterium-oxygen exchange on diamond (100)-A study by ERDA, RBS and TOF-SIMS".Diamond and Related Materials 11.7(2002):1385-1390.
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