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Mechanical design of compliant parallel micromanipulators for nano scale manipulation
Xu Q.; Li Y.
2006-12-01
Conference NameIEEE International Conference of Nano/Micro Engineered and Molecular Systems
Source PublicationProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages653-657
Conference DateJAN 18-21, 2006
Conference PlaceZhuhai, PEOPLES R CHINA
Abstract

As the rapid growing of a wide variety of research and development activities on nanotechnoloty, ultra-high precision nanoposioners are greatly required for nano scale manipulation. In this paper, the design issues of a compliant parallel micromanipulator (CPM) for nanomanipulation is presented from the mechanical design point of view. A CPM is an integration of parallel and compliant mechanisms, the design considerations of which in terms of flexure joints, actuators, materials and fabrications, even modeling methods are proposed, and as an example, a new type of CPM is designed and its applications are presented for nano scale manipulation. The design guidelines outlined in this paper will be valuable for the development of CPMs applicable to nanomanipulation. © 2006 IEEE.

KeywordCompliant Mechanisms Nanomanipulation Parallel Manipulators
DOI10.1109/NEMS.2006.334866
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering ; Science & Technology - Other Topics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology
WOS IDWOS:000248485801032
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Citation statistics
Cited Times [WOS]:1   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Xu Q.,Li Y.. Mechanical design of compliant parallel micromanipulators for nano scale manipulation[C],2006:653-657.
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