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Design of a partially decoupled high precision XYZ compliant parallel micromanipulator
Xu Q.; Li Y.
2008-09-01
Conference Name3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems
Source Publication3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS
Pages13-18
Conference DateJAN 06-09, 2008
Conference PlaceSanya, PEOPLES R CHINA
Abstract

A newly designed three-degree-of-freedom compliant parallel micromanipulator (CPM) with partially decoupled characteristics of XYZ translational motion is proposed in this paper. The CPM is driven by the selected piezoelectric actuators (PZTs) whose strokes are amplified by using the amplification lever mechanism. The design procedure of the CPM is presented in detail, and the CPM parasitic motion is studied analytically. Moreover, its motion properties are verified through the finite element analysis conducted with ANSYS software package. The simulation results reveal that the CPM has negligible parasitic rotations and negligible parasitic translation along one direction, and it possesses a good decoupled property. The CPM is expected to be applied to operate the objects in micro/nano-meter scales with high precision. © 2008 IEEE.

KeywordDecoupled Motion Design Theory Flexure Hinges Parallel Manipulators
DOI10.1109/NEMS.2008.4484277
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS IDWOS:000257066200004
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被引频次[WOS]:6   [WOS记录]     [WOS相关记录]
Document TypeConference paper
专题DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
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Xu Q.,Li Y.. Design of a partially decoupled high precision XYZ compliant parallel micromanipulator[C],2008:13-18.
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