UM  > 科技學院  > 機電工程系
Sliding mode control of a Piezo-driven micropositioning system using extended Kalman filter
Xu Q.; Li Y.
2010-11-17
Conference Name2010 IEEE International Conference on Automation and Logistics
Source Publication2010 IEEE International Conference on Automation and Logistics, ICAL 2010
Pages427-432
Conference Date16-20 Aug. 2010
Conference PlaceHong Kong and Macau, China
Abstract

In this paper, a sliding mode control with perturbation estimation (SMCPE) using an extended Kalman filter (EKF) is proposed for the motion tracking control of a micropositioning system with piezoelectric actuation. Based on the solely measurable position information, the EKF on-line estimates not only the velocity but also the hysteresis term, which are used by the SMCPE for real-time control. The feasibility of the proposed control scheme is demonstrated by experimental studies on a XYZ micropositioning stage prototype. Results show that the EKF-based sliding mode control can reduce the hysteresis to a negligible level and lead to a motion tracking with submicron accuracy, which provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation. © 2010 IEEE.

KeywordHysteresis Compensation Micro/nano-positioning Nonlinear Control Piezoelectric Actuation
DOI10.1109/ICAL.2010.5585322
URLView the original
Fulltext Access
Citation statistics
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Xu Q.,Li Y.. Sliding mode control of a Piezo-driven micropositioning system using extended Kalman filter[C],2010:427-432.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Xu Q.]'s Articles
[Li Y.]'s Articles
Baidu academic
Similar articles in Baidu academic
[Xu Q.]'s Articles
[Li Y.]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Xu Q.]'s Articles
[Li Y.]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.