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Optimal design and fabrication of a piezoactuated flexure XYZ parallel micropositioning stage
Xu Q.; Li Y.
2010-12-01
Conference NameIEEE/RSJ International Conference on Intelligent Robots and Systems
Source PublicationIEEE/RSJ 2010 International Conference on Intelligent Robots and Systems, IROS 2010 - Conference Proceedings
Pages3682-3687
Conference DateOCT 18-22, 2010
Conference PlaceTaipei, TAIWAN
Abstract

This paper presents the design and fabrication process of a new piezoelectrically actuated flexure-based XYZ compliant parallel-kinematics micropositioning stage with totally decoupled properties. The proposed XYZ stage consists of three limbs which are assembled in an orthogonal manner, and it has both input and output decoupling properties. Analytical models for kinematics, statics, and dynamics of the XYZ stage are established, which are validated by finite element analysis performed with ANSYS. Based on the derived models, architectural parameters of the stage are optimized and a prototype is developed for experimental studies. The results not only verify the effectiveness of the conducted optimum design but also confirm the well-decoupled performance of the XYZ stage, which will be used to execute micro-/nanomanipulation tasks. ©2010 IEEE.

DOI10.1109/IROS.2010.5652166
URLView the original
Indexed BySCI
Language英语
WOS Research AreaComputer Science ; Robotics
WOS SubjectComputer Science, Artificial Intelligence ; Computer Science, Information Systems ; Robotics
WOS IDWOS:000287672000015
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Citation statistics
Cited Times [WOS]:8   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Xu Q.,Li Y.. Optimal design and fabrication of a piezoactuated flexure XYZ parallel micropositioning stage[C],2010:3682-3687.
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